The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2020
Filed:
Aug. 23, 2016
Asml Netherlands B.v., Veldhoven, NL;
Cymer, Llc, San Diego, CA (US);
Frank Everts, Eindhoven, NL;
Wilhelmus Patrick Elisabeth Maria Op 't Root, Nederweert, NL;
Herman Philip Godfried, Amsterdam, NL;
Joshua Jon Thornes, San Diego, CA (US);
Kevin Michael O'Brien, San Diego, CA (US);
Leon Pieter Paul Saanen, Eindhoven, NL;
Tanuj Aggarwal, San Diego, CA (US);
ASML Netherlands B.V., Veldhoven, NL;
CYMER, LLC, San Diego, CA (US);
Abstract
A method of controlling output of a radiation source, the method including: periodically monitoring an output energy of the radiation source; determining a difference between a reference energy signal and the monitored output energy; determining a feedback value; determining a desired output energy of the radiation source for a subsequent time period; and controlling an input parameter of the radiation source in dependence on the determined desired output energy during the subsequent time period. If the magnitude of the determined difference between the monitored output energy of the radiation source and the reference energy signal exceeds a threshold value: the determined difference does not contribute to the feedback value; and the determined difference is spread over the subsequent time period according to a reference energy signal adjustment profile and the reference energy signal adjustment profile is added to the reference energy signal for the subsequent time period.