The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 14, 2020

Filed:

Jun. 28, 2018
Applicant:

Intel Corporation, Santa Clara, CA (US);

Inventors:

Randy Koval, Boise, ID (US);

Srikant Jayanti, Singapore, SG;

Hiroyuki Sanda, San Jose, CA (US);

Meng-Wei Kuo, Boise, ID (US);

Srivardhan Gowda, Boise, ID (US);

Krishna Parat, Palo Alto, CA (US);

Assignee:

Intel Corporation, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/423 (2006.01); H01L 27/11556 (2017.01); H01L 27/11521 (2017.01); H01L 29/06 (2006.01); H01L 29/10 (2006.01); H01L 29/04 (2006.01); H01L 21/311 (2006.01); H01L 21/3213 (2006.01); H01L 21/02 (2006.01); H01L 21/28 (2006.01); H01L 27/11519 (2017.01); H01L 29/788 (2006.01);
U.S. Cl.
CPC ...
H01L 29/42324 (2013.01); H01L 21/0217 (2013.01); H01L 21/31111 (2013.01); H01L 21/32133 (2013.01); H01L 27/11521 (2013.01); H01L 27/11556 (2013.01); H01L 29/04 (2013.01); H01L 29/0649 (2013.01); H01L 29/1037 (2013.01); H01L 29/40114 (2019.08); H01L 21/0262 (2013.01); H01L 21/02164 (2013.01); H01L 21/02271 (2013.01); H01L 21/02532 (2013.01); H01L 21/02595 (2013.01); H01L 27/11519 (2013.01); H01L 29/7883 (2013.01);
Abstract

A 3D memory structure including a modified floating gate and dielectric layer geometry is described. In embodiments, a memory cell includes a channel region and a floating gate where a length of the floating gate along a direction of the channel region is substantially longer than a length of the floating gate along an orthogonal direction along the channel region. A control gate adjacent to the floating gate extends at least as long as the control gate along the direction of the channel region and includes a tapered edge extending away from the channel region towards the control gate. In embodiments, a dielectric layer between the control gate and the floating gate may follow the tapered edge along the floating gate and form a discrete region proximate to the floating gate to at least partially insulate the floating gate from an adjacent memory cell. Other embodiments are disclosed and claimed.


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