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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10622362 B1

PDFFull Text
Date of Patent:
Apr. 14, 2020

Filed:

Jun. 18, 2019

Capacitor structure and fabrication method thereof

Applicants:

United Microelectronics Corp., Hsin-Chu, TW;

Fujian Jinhua Integrated Circuit Co., Ltd., Quanzhou, Fujian Province, CN;

Inventors:

Feng-Yi Chang, Tainan, TW;

Fu-Che Lee, Taichung, TW;

Yi-Wang Zhan, Taichung, TW;

Chieh-Te Chen, Kaohsiung, TW;

Assignees:

UNITED MICROELECTRONICS CORP., Hsin-Chu, TW;

Fujian Jinhua Integrated Circuit Co., Ltd., Quanzhou, Fujian Province, CN;

Attorney:

Winston Hsu

Primary Examiner:

Douglas M Menz

Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 27/108 (2006.01); H01L 21/311 (2006.01); H01L 49/02 (2006.01);
U.S. Cl.
CPC ...
H01L 27/10814 (2013.01); H01L 21/0217 (2013.01); H01L 21/02532 (2013.01); H01L 21/02592 (2013.01); H01L 21/31116 (2013.01); H01L 27/10852 (2013.01); H01L 27/10855 (2013.01); H01L 28/91 (2013.01);
Abstract

A capacitor structure includes a semiconductor substrate, a dielectric layer disposed on the semiconductor substrate, a storage node pad disposed in the dielectric layer, and a cylindrical lower electrode including a bottom portion recessed into the dielectric layer and in contact with the storage node pad. The bottom extends to a sidewall of the storage node pad.

Find Patent Forward Citations

Chang, Feng-Yi. (2020). Capacitor structure and fabrication method thereof (U.S. Patent No. 10622362). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10622362

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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