The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2020
Filed:
Apr. 04, 2017
Globalfoundries Inc., Grand Cayman, KY;
Erik A. Verduijn, Rensselaer, NY (US);
Genevieve Beique, Clifton Park, NY (US);
Nicholas V. LiCausi, Watervliet, NY (US);
Lei Sun, Altamont, NY (US);
Francis G. Goodwin, Halfmoon, NY (US);
GLOBALFOUNDRIES INC., Grand Cayman, KY;
Abstract
The disclosure is directed to methods of identifying a space within an integrated circuit structure as a mandrel space or a non-mandrel space. One method may include: identifying a space between freestanding spacers as being one of: a former mandrel space created by removal of a mandrel from between the freestanding spacers or a non-mandrel space between adjacent mandrels prior to removal of the mandrel, based on a line width roughness of the space, wherein the line width roughness represents a deviation of a width of the space from a centerline axis along a length of the space.