The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2020
Filed:
May. 09, 2019
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Arthur M. Howald, Livermore, CA (US);
John C. Valcore, Jr., Fremont, CA (US);
Andrew Fong, Pleasanton, CA (US);
David Hopkins, Newark, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 17/11 (2006.01); G06F 17/50 (2006.01);
U.S. Cl.
CPC ...
G06F 17/11 (2013.01); G06F 17/5036 (2013.01); G06F 17/5063 (2013.01);
Abstract
Systems and methods for tuning an impedance matching network in a step-wise fashion are described. By tuning the impedance matching network in a step-wise fashion instead of directly to achieve optimum values of a radio frequency (RF) and a combined variable capacitance, processing of a wafer using the tuned optimal values becomes feasible.