The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 07, 2020

Filed:

Oct. 09, 2018
Applicant:

Winbond Electronics Corp., Taichung, TW;

Inventors:

Hsiu-Han Liao, Hsinchu, TW;

Che-Fu Chuang, Pitou Township, Changhua County, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); H01L 23/544 (2006.01); H01L 23/58 (2006.01); H01L 23/00 (2006.01);
U.S. Cl.
CPC ...
H01L 22/32 (2013.01); H01L 22/34 (2013.01); H01L 23/544 (2013.01); H01L 23/562 (2013.01); H01L 23/564 (2013.01); H01L 23/585 (2013.01); H01L 2223/5446 (2013.01);
Abstract

A semiconductor wafer with a test key structure is provided. The semiconductor wafer includes a semiconductor substrate including a scribe line region, a chip region, and a seal ring region between the scribe line region and the chip region. A test pad structure and a test element are disposed over the semiconductor substrate corresponding to the scribe line region. A conductive line is disposed over the semiconductor substrate corresponding to the seal ring region, and has two ends extending to the scribe line region and electrically connected between the test pad structure and the test element.


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