The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 07, 2020

Filed:

Mar. 26, 2019
Applicant:

Carl Zeiss Microscopy Gmbh, Jena, DE;

Inventors:

Luyang Han, Heidenheim, DE;

Joerg Fober, Heuchlingen, DE;

Stefan Meyer, Aalen, DE;

Wolfgang Berger, Gerstetten, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/244 (2006.01); H01J 37/06 (2006.01); H01J 37/26 (2006.01);
U.S. Cl.
CPC ...
H01J 37/265 (2013.01); H01J 37/244 (2013.01); H01J 2237/2441 (2013.01); H01J 2237/2448 (2013.01); H01J 2237/2482 (2013.01); H01J 2237/24475 (2013.01); H01J 2237/24495 (2013.01);
Abstract

An electron beam microscope includes an energy-sensitive detector to detect backscattered electrons and a signal processor for processing detection signals of the detector. The signal processor includes an analog amplifier. The signal processor also includes a window comparator having a signal input connected to an output of the analog amplifier. A signal generated at an output of the signal processor is generated based on a signal provided at an output the window comparator. The window comparator is configured to output a predetermined signal only if the amplified signal supplied to its signal input is less than or equal to an upper threshold and greater than or equal to a lower threshold.


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