The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 07, 2020

Filed:

Mar. 07, 2018
Applicant:

National Chung Shan Institute of Science and Technology, Taoyuan, TW;

Inventors:

Dai-Liang Ma, Taoyuan, TW;

Tsao-Chun Peng, Taoyuan, TW;

Cheng-Jung Ko, Taoyuan, TW;

Bang-Ying Yu, Taoyuan, TW;

Chih-Wei Kuo, Taoyuan, TW;

Ying-Cong Zhao, Taoyuan, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 29/36 (2006.01); H01L 21/324 (2006.01); C30B 29/40 (2006.01); C30B 23/06 (2006.01); F27D 21/00 (2006.01); G01K 1/08 (2006.01); F27D 19/00 (2006.01);
U.S. Cl.
CPC ...
C30B 29/36 (2013.01); C30B 23/06 (2013.01); C30B 29/403 (2013.01); F27D 21/0014 (2013.01); G01K 1/08 (2013.01); H01L 21/324 (2013.01); F27D 2019/0025 (2013.01); Y10T 117/1024 (2015.01);
Abstract

A device for measuring distribution of thermal field in a crucible comprises a crucible comprising an upper lid, a body, a growth chamber and a material source zone; a thermally insulating material disposed outside the crucible; a movable heating component for heating the crucible; a plurality of thermocouples enclosed by insulating, high temperature resistant material and disposed in the crucible after being inserted into a plurality of holes on the upper lid to measure distribution of thermal field in the crucible. The thermocouples enclosed by insulating, high temperature resistant material are effective in measuring and adjusting temperature distribution in the crucible to achieve optimal temperature distribution for crystal growth in the crucible.


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