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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10607873 B1

PDFFull Text
Expired
Date of Patent:
Mar. 31, 2020

Filed:

Mar. 23, 2017

Substrate edge detection

Applicant:

Asml Netherlands B.v., Veldhoven, NL;

Inventors:

Eric Anthony Janda, Chandler, AZ (US);

Cayetano Sánchez-Fabrés Cobaleda, Eindhoven, NL;

Bernd Peter Geh, Scottsdale, AZ (US);

Simon Gijsbert Josephus Mathijssen, Rosmalen, NL;

Assignee:

ASML Netherlands B.V., Veldhoven, NL;

Attorney:

Pillsbury Winthrop Shaw Pittman LLP

Primary Examiner:

Michelle M Iacoletti

Int. Cl.
CPC ...
G03F 9/00 (2006.01); H01L 21/67 (2006.01); H01L 21/68 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
H01L 21/681 (2013.01); G03F 7/70775 (2013.01); G03F 9/7049 (2013.01); G03F 9/7065 (2013.01); G03F 9/7076 (2013.01); G03F 9/7088 (2013.01); G03F 9/7092 (2013.01); H01L 21/67259 (2013.01);
Abstract

A method including directing, by an optical system, an illumination beam to a surface of a substrate, providing relative motion between the directed illumination beam and the substrate until the directed illumination beam is illuminated on a grating underneath an edge or a notch of the substrate, diffracting, by the grating, at least a portion of the illumination beam, and detecting, by the detector, the diffracted illumination.

Find Patent Forward Citations

Janda, Eric. (2020). Substrate edge detection (U.S. Patent No. 10607873). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10607873

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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