The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2020
Filed:
Mar. 23, 2017
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Eric Anthony Janda, Chandler, AZ (US);
Cayetano Sánchez-Fabrés Cobaleda, Eindhoven, NL;
Bernd Peter Geh, Scottsdale, AZ (US);
Simon Gijsbert Josephus Mathijssen, Rosmalen, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 9/00 (2006.01); H01L 21/67 (2006.01); H01L 21/68 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
H01L 21/681 (2013.01); G03F 7/70775 (2013.01); G03F 9/7049 (2013.01); G03F 9/7065 (2013.01); G03F 9/7076 (2013.01); G03F 9/7088 (2013.01); G03F 9/7092 (2013.01); H01L 21/67259 (2013.01);
Abstract
A method including directing, by an optical system, an illumination beam to a surface of a substrate, providing relative motion between the directed illumination beam and the substrate until the directed illumination beam is illuminated on a grating underneath an edge or a notch of the substrate, diffracting, by the grating, at least a portion of the illumination beam, and detecting, by the detector, the diffracted illumination.