The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 31, 2020

Filed:

Aug. 18, 2017
Applicant:

Atotech Deutschland Gmbh, Berlin, DE;

Inventor:

Ray Weinhold, Berlin, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25D 17/00 (2006.01); C25D 3/38 (2006.01); C25D 5/02 (2006.01); C25D 5/08 (2006.01); C25D 17/12 (2006.01); H01L 21/288 (2006.01);
U.S. Cl.
CPC ...
C25D 17/001 (2013.01); C25D 3/38 (2013.01); C25D 5/026 (2013.01); C25D 5/08 (2013.01); C25D 17/12 (2013.01); C25D 17/008 (2013.01); H01L 21/2885 (2013.01);
Abstract

Device for vertical galvanic metal deposition on a substrate comprising a first and a second device, arranged vertically parallel to each other; the first device comprising a first anode having a plurality of through-going conduits and a first carrier having a plurality of through-going conduits; wherein said first anode and said first carrier are connected to each other; wherein the second device comprises a first substrate holder adapted to receive a first substrate to be treated, wherein said first substrate holder at least partially surrounds the first substrate along its outer frame, wherein the first device further comprises a plurality of plugs, each plug comprising a through-going channel, each plug arranged such that it runs from the backside of the first carrier through a through-going conduit of the first carrier and further through the conduit of the first anode element, and the plugs are detachably connected to the first device.


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