The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2020
Filed:
Dec. 29, 2017
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
Bjorn Brauer, Beaverton, OR (US);
Benjamin Murray, Portland, OR (US);
Shishir Suman, Bihar, IN;
Lisheng Gao, Saratoga, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06T 7/00 (2017.01); G01N 21/95 (2006.01); G01N 21/88 (2006.01); G01N 21/956 (2006.01); G06T 7/73 (2017.01); G06F 17/50 (2006.01);
U.S. Cl.
CPC ...
G06T 7/0006 (2013.01); G01N 21/8851 (2013.01); G01N 21/9501 (2013.01); G01N 21/95607 (2013.01); G06F 17/5081 (2013.01); G06T 7/001 (2013.01); G06T 7/74 (2017.01); G01N 2021/8861 (2013.01); G06T 2207/30148 (2013.01);
Abstract
Systems and methods of a two-pass inspection methodology that dynamically creates micro care areas for inspection of repeater defects. Micro care areas can be formed around each location of a repeater defect. After inspection, additional repeater defects in the micro care areas can be identified. Attributes of the repeater defects can be compared and any repeater defects with attributes that deviate from an expected group attribute distribution can be classified as nuisance.