The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2020
Filed:
Aug. 28, 2017
Fei Company, Hillsboro, OR (US);
Remco Schoenmakers, Best, NL;
Pavel Poto{hacek over (c)}ek, Eindhoven, NL;
FEI Company, Hillsboro, OR (US);
Abstract
Methods of investigating a specimen using tomographic imaging include directing a beam of radiation through a specimen and onto a detector, thereby generating an image of the specimen. The directing is repeated for different specimen orientations relative to the beam, thereby generating a corresponding set of images. An iterative mathematical reconstruction technique is used to convert the images into a tomogram. The reconstruction is mathematically constrained to curtail a solution space using three-dimensional SEM imagery of at least a part of the specimen that overlaps the tomogram by requiring iterative results of the reconstruction to be consistent with pixel values derived from the SEM imagery.