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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10593062 B1

PDFFull Text
Date of Patent:
Mar. 17, 2020

Filed:

Dec. 21, 2016

Defect observation apparatus

Applicant:

Hitachi High-technologies Corporation, Minato-ku, Tokyo, JP;

Inventors:

Yuko Otani, Tokyo, JP;

Kazuo Aoki, Tokyo, JP;

Yohei Minekawa, Tokyo, JP;

Assignee:

HITACHI HIGH-TECHNOLOGIES CORPORATION, Tokyo, JP;

Attorney:

Miles & Stockbridge, P.C.

Primary Examiner:

James T Boylan

Int. Cl.
CPC ...
G06T 7/80 (2017.01); H04N 5/232 (2006.01); H04N 5/225 (2006.01); G02B 21/12 (2006.01); G03F 7/20 (2006.01); G06T 7/73 (2017.01); G01N 21/95 (2006.01); G01N 21/956 (2006.01); G01N 23/2251 (2018.01); G02B 21/00 (2006.01); G02B 21/06 (2006.01); G02B 21/36 (2006.01); G06K 9/62 (2006.01); G06T 7/00 (2017.01); H04N 5/235 (2006.01); H04N 7/18 (2006.01);
U.S. Cl.
CPC ...
G06T 7/80 (2017.01); G01N 21/9501 (2013.01); G01N 21/956 (2013.01); G01N 23/2251 (2013.01); G02B 21/0016 (2013.01); G02B 21/06 (2013.01); G02B 21/125 (2013.01); G02B 21/365 (2013.01); G03F 7/7065 (2013.01); G06K 9/6202 (2013.01); G06T 7/001 (2013.01); G06T 7/74 (2017.01); H04N 5/2256 (2013.01); H04N 5/2354 (2013.01); H04N 5/23245 (2013.01); H04N 5/23296 (2013.01); H04N 7/181 (2013.01); G01N 2223/418 (2013.01); G01N 2223/6116 (2013.01); G06T 2207/10061 (2013.01); G06T 2207/30148 (2013.01); H04N 5/23238 (2013.01);
Abstract

A defect observation apparatus includes a storage unit configured to store defect information about defects detected by an external inspection apparatus; a first imaging unit configured to capture an image of a defect using a first imaging condition and a second imaging condition; a control unit configured to correct positional information on the defect using the image captured with the first imaging unit; and a second imaging unit configured to capture an image of the defect based on the corrected positional information.

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Otani, Yuko. (2020). Defect observation apparatus (U.S. Patent No. 10593062). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10593062

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