The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 03, 2020

Filed:

Aug. 21, 2018
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;

Inventors:

Jin-Ho Chun, Seoul, KR;

Seong-Min Son, Hwaseong-si, KR;

Hyung-Jun Jeon, Seoul, KR;

Kwang-Jin Moon, Hwaseong-si, KR;

Jin-Ho An, Seoul, KR;

Ho-Jin Lee, Seoul, KR;

Atsushi Fujisaki, Seongnam-si, KR;

Assignee:

SAMSUNG ELECTRONICS CO., LTD., Suwon-si, Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/498 (2006.01); H01L 23/525 (2006.01); H01L 23/532 (2006.01); H01L 23/31 (2006.01); H01L 23/00 (2006.01); H01L 21/768 (2006.01); H01L 23/48 (2006.01);
U.S. Cl.
CPC ...
H01L 23/49827 (2013.01); H01L 21/76852 (2013.01); H01L 21/76885 (2013.01); H01L 21/76898 (2013.01); H01L 23/3114 (2013.01); H01L 23/481 (2013.01); H01L 23/525 (2013.01); H01L 23/5328 (2013.01); H01L 24/11 (2013.01); H01L 24/13 (2013.01); H01L 24/48 (2013.01); H01L 21/76805 (2013.01); H01L 2224/11001 (2013.01); H01L 2224/13101 (2013.01); H01L 2224/13139 (2013.01); H01L 2224/13147 (2013.01); H01L 2224/16145 (2013.01); H01L 2224/16225 (2013.01); H01L 2224/73204 (2013.01); H01L 2224/8385 (2013.01); H01L 2924/1431 (2013.01); H01L 2924/1436 (2013.01); H01L 2924/15192 (2013.01); H01L 2924/15311 (2013.01);
Abstract

A semiconductor device and a method of manufacturing the same, the device including a through-hole electrode structure extending through a substrate; a redistribution layer on the through-hole electrode structure; and a conductive pad, the conductive pad including a penetrating portion extending through the redistribution layer; and a protrusion portion on the penetrating portion, the protrusion portion protruding from an upper surface of the redistribution layer, wherein a central region of an upper surface of the protrusion portion is flat and not closer to the substrate than an edge region of the upper surface of the protrusion portion.


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