The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2020
Filed:
Jul. 23, 2019
Applicant:
Evatec Ag, Trubbach, CH;
Inventor:
Jurgen Weichart, Balzers, LI;
Assignee:
EVATEC AG, Trübbach, CH;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/324 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67155 (2013.01); H01L 21/324 (2013.01); H01L 21/67017 (2013.01); H01L 21/67098 (2013.01); H01L 21/67161 (2013.01); H01L 21/67167 (2013.01); H01L 21/67178 (2013.01); H01L 21/67184 (2013.01); H01L 21/67207 (2013.01);
Abstract
A heater or cooler chamber for a batch of more than one workpiece includes a heat storage block. In the block a multitude of pockets are provided, whereby each of the pockets may be closed or opened by a controllably operated door. A heater or cooler arrangement is applied. The pockets are tailored to surround a workpiece applied therein in a non-contact closely spaced manner.