The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2020
Filed:
Jun. 03, 2019
Phenom-world Holding B.v., Eindhoven, NL;
Gerhardus Bernardus Stamsnijder, Eindhoven, NL;
Paul Cornelis Maria van den Bos, Eindhoven, NL;
Ton Antonius Cornelis Henricus Kluijtmans, Eindhoven, NL;
Sander Richard Marie Stoks, Eindhoven, NL;
Adrianus Franciscus Johannes Hammen, Eindhoven, NL;
Karel Diederick van der Mast, Eindhoven, NL;
Phenom-World Holding B.V., Eindhoven, NL;
Abstract
Sample stage, e.g. for use in a scanning electron microscope. The sample stage includes a base, a sample carrier, and an actuator assembly arranged for moving the sample carrier in at least one direction substantially parallel to the base. The actuator assembly is arranged so as not to contribute to the mechanical stiffness of the sample stage from the sample carrier to the base.