The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 03, 2020

Filed:

Apr. 01, 2019
Applicant:

Sigray, Inc., Concord, CA (US);

Inventors:

Wenbing Yun, Walnut Creek, CA (US);

Srivatsan Seshadri, Pleasanton, CA (US);

Sylvia Jia Yun Lewis, San Francisco, CA (US);

Janos Kirz, Berkeley, CA (US);

Assignee:

Sigray, Inc., Concord, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/223 (2006.01); G01N 23/22 (2018.01); G01N 23/2209 (2018.01); G01N 23/2204 (2018.01);
U.S. Cl.
CPC ...
G01N 23/2209 (2018.02); G01N 23/223 (2013.01); G01N 23/2204 (2013.01); G01N 2223/501 (2013.01);
Abstract

Systems and methods for x-ray emission spectroscopy are provided in which at least one x-ray analyzer is curved and receives and diffracts fluorescence x-rays emitted from a sample, and at least one spatially-resolving x-ray detector receives the diffracted x-rays. The at least one x-ray analyzer and the at least one spatially-resolving x-ray detector are positioned on the Rowland circle. In some configurations, the fluorescence x-rays are emitted from the same surface of the sample that is irradiated by the x-rays from an x-ray source and the system has an off-Rowland circle geometry. In some other configurations, an x-ray optical train receives the fluorescence x-rays emitted from a sample impinged by electrons within an electron microscope and focuses at least some of the received fluorescence x-rays to a focal spot.


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