The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 03, 2020

Filed:

Jun. 19, 2017
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Bruce Cho, Hsinchu, TW;

Chia-Ying Tien, Hsinchu, TW;

Huang-Chu Ko, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 47/12 (2006.01); B24B 37/005 (2012.01); B24B 37/10 (2012.01); H01L 21/321 (2006.01);
U.S. Cl.
CPC ...
B24B 47/12 (2013.01); B24B 37/005 (2013.01); B24B 37/10 (2013.01); H01L 21/3212 (2013.01);
Abstract

A platen rotation apparatus includes a rotator assembly coupled with a platen. The rotator assembly operates in a first mode to increase a rotational kinetic energy of the platen based on an electrical energy input, and, in a second mode, to decrease the rotational kinetic energy of the platen and generate an electrical energy output based on the decreased rotational kinetic energy of the platen. An energy storage device electrically coupled with the rotator assembly provides the electrical energy input when the rotator assembly is in the first mode and receives the electrical energy output when the rotator assembly is in the second mode.


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