The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2020
Filed:
Jun. 05, 2018
Nuflare Technology, Inc., Yokohama-shi, JP;
Takafumi Inoue, Chigasaki, JP;
NuFlare Technology, Inc., Yokohama-shi, JP;
Abstract
An inspection regionof a sampleis scanned with light, an optical image formed of the scanning light is acquired according to progression of scanning with the light, a reference image as a reference for the acquired optical image is created according to progression of acquisition of the optical image, the acquired optical image is compared to the reference image for the optical image to detect first defects in the pattern according to progression of the acquisition of the optical image, second defects caused by an erroneous operation of an inspection systemare detected based on a distribution of differences between the acquired optical image and the reference image during progression of detection of the first defects, and an inspection is stopped when the second defects are detected.