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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10558119 B1

PDFFull Text
Date of Patent:
Feb. 11, 2020

Filed:

May. 20, 2016

Composition for coating resist pattern

Applicant:

Nissan Chemical Industries, Ltd., Tokyo, JP;

Inventors:

Wataru Shibayama, Toyama, JP;

Makoto Nakajima, Toyama, JP;

Shuhei Shigaki, Toyama, JP;

Hiroaki Yaguchi, Toyama, JP;

Rikimaru Sakamoto, Toyama, JP;

Assignee:

NISSAN CHEMICAL INDUSTRIES, LTD., Tokyo, JP;

Attorney:

Oliff PLC

Primary Examiner:

Angel Roman

Int. Cl.
CPC ...
G03F 7/11 (2006.01); C09D 183/04 (2006.01); C08G 77/04 (2006.01); H01L 21/308 (2006.01); G03F 7/16 (2006.01); G03F 7/20 (2006.01); G03F 7/38 (2006.01); G03F 7/32 (2006.01); C08G 77/26 (2006.01); C09D 183/08 (2006.01); G03F 7/40 (2006.01); C08G 77/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/11 (2013.01); C08G 77/04 (2013.01); C08G 77/045 (2013.01); C08G 77/26 (2013.01); C09D 183/04 (2013.01); C09D 183/08 (2013.01); G03F 7/162 (2013.01); G03F 7/168 (2013.01); G03F 7/2006 (2013.01); G03F 7/322 (2013.01); G03F 7/38 (2013.01); G03F 7/405 (2013.01); H01L 21/3081 (2013.01); H01L 21/3086 (2013.01); C08G 77/70 (2013.01);
Abstract

The invention provides a composition for coating a resist pattern and reversing the pattern by utilizing a difference in etching rates. A composition for applying to a resist pattern includes a component (A) which is at least one compound selected from the group consisting of a metal oxide (a1), a polyacid (a2), a polyacid salt (a3), a hydrolyzable silane (a4), a hydrolysis product (a5) of the hydrolyzable silane, and a hydrolysis condensate (a6) of the hydrolyzable silane; and a component (B), which is an aqueous solvent, in which the hydrolyzable silane (a4) is (i) a hydrolyzable silane containing an organic group having an amino group, (ii) a hydrolyzable silane containing an organic group having an ionic functional group, (iii) a hydrolyzable silane containing an organic group having hydroxy group, or (iv) a hydrolyzable silane containing an organic group having a functional group convertible to hydroxy group.

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