The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 11, 2020
Filed:
Mar. 28, 2017
Applicant:
Asylum Research Corporation, Santa Barbara, CA (US);
Inventors:
Roger Proksch, Santa Barbara, CA (US);
Anil Gannepalli, Golsta, CA (US);
Assignee:
Oxford Instruments Asylum Research Inc, Goleta, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 40/00 (2010.01); G01Q 60/32 (2010.01); B82Y 35/00 (2011.01);
U.S. Cl.
CPC ...
B82Y 35/00 (2013.01); G01Q 40/00 (2013.01); G01Q 60/32 (2013.01);
Abstract
Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information from piezoelectric, polymer and other materials using contact resonance with multiple excitation signals are also described.