The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 04, 2020

Filed:

Apr. 12, 2017
Applicant:

Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;

Inventors:

Perrine Batude, Dijon, FR;

Nicolas Posseme, Sassenage, FR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/306 (2006.01); H01L 27/12 (2006.01); H01L 29/66 (2006.01); H01L 21/8238 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66636 (2013.01); H01L 21/0217 (2013.01); H01L 21/30604 (2013.01); H01L 21/8238 (2013.01); H01L 29/66545 (2013.01); H01L 29/66553 (2013.01);
Abstract

A method for producing a microelectronic device with one or more transistor(s) including forming a first gate on a region of a semiconductor layer, forming a first cavity in the semiconductor layer, the first cavity having a wall contiguous with the given region, filling the first cavity in such a way as to form a first semiconductor block wherein a source or drain region of the first transistor is capable of being produced, by epitaxial growth of a first semiconductor material in the first cavity, the growth being carried out such that a first zone of predetermined thickness of the layer of first semiconductor material lines the wall contiguous with the given region, epitaxial growth of a second zone made of a second semiconductor material on the first zone.


Find Patent Forward Citations

Loading…