The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2020
Filed:
Mar. 22, 2018
Applicant:
Rudolph Technologies, Inc., Wilmington, MA (US);
Inventors:
Gurvinder Singh, Corcoran, MN (US);
Wu Y. Han, Plano, TX (US);
John Thornell, McKinney, TX (US);
Chetan Suresh, Bloomington, MN (US);
Wayne Fitzgerald, Andover, MA (US);
Assignee:
Rudolph Technologies, Inc., Wilmington, MA (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); G01N 21/64 (2006.01); G01N 21/95 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 22/20 (2013.01); G01N 21/64 (2013.01); G01N 21/9501 (2013.01); H01L 21/02068 (2013.01);
Abstract
Concepts presented herein relate to approaches for performing substrate inspection. In one aspect, the concepts relate to detecting anomalies or candidate defects on the substrate based on contrast in images obtained of the substrate.