The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2020
Filed:
Apr. 07, 2017
Applicants:
Asm Ip Holding B.v., Almere, NL;
Imec Vzw, Leuven, BE;
Inventors:
Werner Knaepen, Leuven, BE;
Jan Willem Maes, Wilrijk, BE;
Maarten Stokhof, Winksele, BE;
Roel Gronheid, Huldenberg, BE;
Hari Pathangi Sriraman, Leuven, BE;
Assignees:
ASM IP HOLDING B.V., Almere, NL;
IMEC vzw, Leuven, BE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/16 (2006.01); H01L 21/027 (2006.01); H01L 21/67 (2006.01); H01L 21/768 (2006.01); H01L 51/00 (2006.01); H01L 21/469 (2006.01); H01L 21/31 (2006.01); B05D 3/04 (2006.01); B05D 3/02 (2006.01);
U.S. Cl.
CPC ...
G03F 7/168 (2013.01); B05D 3/0254 (2013.01); B05D 3/04 (2013.01); B05D 3/0486 (2013.01); H01L 21/027 (2013.01); H01L 21/31 (2013.01); H01L 21/469 (2013.01); H01L 21/67098 (2013.01); H01L 21/67155 (2013.01); H01L 21/67161 (2013.01); H01L 21/67167 (2013.01); H01L 21/67207 (2013.01); H01L 21/76841 (2013.01); H01L 51/0018 (2013.01); B05D 2203/30 (2013.01); H01L 2224/0362 (2013.01); H01L 2224/11622 (2013.01); H01L 2224/27622 (2013.01);
Abstract
A method of forming a directed self-assembled (DSA) layer on a substrate by: providing a substrate; applying a layer comprising a self-assembly material on the substrate; and annealing of the self-assembly material of the layer to form a directed self-assembled layer by providing a controlled temperature and gas environment around the substrate. The controlled gas environment comprises molecules comprising an oxygen element with a partial pressure between 10-2000 Pa.