The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2020
Filed:
Dec. 14, 2016
Asml Netherlands B.v., Veldhoven, NL;
Martin Jacobus Johan Jak, 's-Hertogenbosch, NL;
Armand Eugene Albert Koolen, Nuth, NL;
Gerbrand Van Der Zouw, Waalre, NL;
Dirk Karel Margaretha Broddin, Terneuzen, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An inspection apparatus includes an optical system, which has a radiation beam delivery system for delivering radiation to a target, and a radiation beam collection system for collecting radiation after scattering from the target. Both the delivery system and the collection system comprise optical components that control the characteristics of the radiation and the collected radiation. By controlling the characteristics of one or both of the radiation and collected radiation, the depth of focus of the optical system may be increased.