The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2020
Filed:
Sep. 13, 2016
Applicant:
Fei Company, Hillsboro, OR (US);
Inventors:
Bart Buijsse, Eindhoven, NL;
Faysal Boughorbel, Eindhoven, NL;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/04 (2018.01); H01J 35/00 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
G01N 23/04 (2013.01); H01J 37/28 (2013.01);
Abstract
An x-ray source for computer tomography uses several sub-sources. An electron beam impacts the several sub-sources to achieve a high x-ray flux with high resolution. The several sub-sources produce a composite image, which is deconvolved to disentangle the composite image and render a useful image. The configuration of the several sub-sources can be optimized for a given specimen structure.