The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 21, 2020
Filed:
Jan. 26, 2015
Applicant:
Rohm and Haas Electronic Materials Llc, Marlborough, MA (US);
Inventors:
James F. Cameron, Cambridge, MA (US);
Jin Wuk Sung, Worcester, MA (US);
John P. Amara, Charlestown, MA (US);
Gregory P. Prokopowicz, Worcester, MA (US);
David A. Valeri, Leominster, MA (US);
Assignee:
Rohm and Haas Electronic Materials LLC, Marlborough, MA (US);
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/32 (2006.01); G03F 7/20 (2006.01); G03F 7/16 (2006.01); G03F 7/11 (2006.01); G03F 7/09 (2006.01); C09D 5/00 (2006.01); C08F 220/36 (2006.01); C09D 133/12 (2006.01); B05D 1/00 (2006.01); B05D 3/02 (2006.01); B05D 3/06 (2006.01); B05D 5/06 (2006.01); B05D 7/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/091 (2013.01); B05D 1/005 (2013.01); B05D 3/0254 (2013.01); B05D 3/06 (2013.01); B05D 5/061 (2013.01); B05D 7/54 (2013.01); C08F 220/36 (2013.01); C09D 5/006 (2013.01); C09D 133/12 (2013.01); G03F 7/11 (2013.01); G03F 7/16 (2013.01); G03F 7/20 (2013.01); G03F 7/322 (2013.01);
Abstract
Organic coating compositions, particularly antireflective coating compositions, are provided that comprise that comprise a diene/dienophile reaction product. Preferred compositions of the invention are useful to reduce reflection of exposing radiation from a substrate back into an overcoated photoresist layer and/or function as a planarizing, conformal or via-fill layer.