The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 21, 2020
Filed:
Dec. 11, 2015
Disco Corporation, Tokyo, JP;
Hirokazu Matsumoto, Tokyo, JP;
Saki Kimura, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
A laser processing method includes a supporting step of attaching an adhesive tape to an annular frame having an opening for accommodating the plate-shaped workpiece and attaching the plate-shaped workpiece to the adhesive tape. The adhesive tape is composed of a base film, an adhesive layer formed on one side of the base film, and a functional layer formed on the other side of the base film. The functional layer includes fine particles of metal oxide, emulsion particles of thermoplastic resin as a binder, and a dispersing medium. The laser processing method further includes a laser processed groove forming step of applying a laser beam from a laser beam applying unit to the plate-shaped workpiece held on the chuck table and relatively feeding the chuck table and the laser beam applying unit by operating a feeding unit, thereby forming the laser processed groove on the plate-shaped workpiece.