The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 07, 2020

Filed:

Aug. 23, 2017
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Chia-Chung Chen, Keelung, TW;

Chi-Feng Huang, Hsinchu County, TW;

Victor Chiang Liang, Hsinchu, TW;

Fu-Huan Tsai, Kaohsiung, TW;

Hsieh-Hung Hsieh, Taipei, TW;

Tzu-Jin Yeh, Hsinchu, TW;

Han-Min Tsai, Hsinchu, TW;

Hong-Lin Chu, Hsinchu, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/088 (2006.01); H01L 21/8234 (2006.01); H01L 29/167 (2006.01); H01L 29/10 (2006.01); H01L 29/423 (2006.01); H01L 29/417 (2006.01); H03D 7/14 (2006.01); H01L 21/8238 (2006.01);
U.S. Cl.
CPC ...
H01L 27/0886 (2013.01); H01L 21/823412 (2013.01); H01L 21/823431 (2013.01); H01L 29/1033 (2013.01); H01L 29/167 (2013.01); H01L 29/41783 (2013.01); H01L 29/42376 (2013.01); H03D 7/1441 (2013.01); H03D 7/1458 (2013.01); H01L 21/823807 (2013.01); H01L 21/823821 (2013.01);
Abstract

A method for manufacturing a semiconductor device includes forming one or more fins extending in a first direction over a substrate. The one or more fins include a first region along the first direction and second regions on both sides of the first region along the first direction. A dopant is implanted in the first region of the fins but not in the second regions. A gate structure overlies the first region of the fins and source/drains are formed on the second regions of the fins.


Find Patent Forward Citations

Loading…