The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2020
Filed:
May. 27, 2016
Applicant:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Inventors:
Ying-Hao Kuo, Hsin-Chu, TW;
Tien-Yu Huang, Shuishang Township, TW;
Assignee:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/311 (2006.01); G02B 6/136 (2006.01); G02B 6/122 (2006.01); G02B 6/12 (2006.01); G02B 6/124 (2006.01); G02B 5/18 (2006.01); G02B 6/42 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
G02B 6/136 (2013.01); G02B 5/1857 (2013.01); G02B 6/122 (2013.01); G02B 6/124 (2013.01); G02B 6/12007 (2013.01); G02B 6/4214 (2013.01); G02B 6/4245 (2013.01); H01L 21/31111 (2013.01); H01L 21/31116 (2013.01); H01L 21/76877 (2013.01); G02B 2006/121 (2013.01); G02B 2006/12104 (2013.01); G02B 2006/12154 (2013.01); G02B 2006/12164 (2013.01); G02B 2006/12176 (2013.01);
Abstract
A semiconductor device includes a substrate, a trench in the substrate, the trench having an inclined sidewall, a reflective layer over the inclined sidewall, a grating structure over the substrate, and a waveguide in the trench. The waveguide is configured to guide optical signals between the grating structure and the reflective layer.