The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2019
Filed:
Dec. 29, 2016
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Fu-Huan Tsai, Kaohsiung, TW;
Han-Min Tsai, Hsin-Chu, TW;
Chia-Chung Chen, Keelung, TW;
Chi-Feng Huang, Hsinchu County, TW;
Victor Chiang Liang, Hsinchu, TW;
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsin-Chu, TW;
Abstract
Disclosed is a FinFET varactor with low threshold voltage and methods of making the same. A disclosed method includes receiving a semiconductor layer over a substrate and having channel, source, and drain regions. The method includes forming a well in the semiconductor layer to have a first dopant, and implanting a second dopant into the well. The first and second dopants are of opposite doping types. A first portion of the well has a higher concentration of the second dopant than the first dopant. A second portion of the well under the first portion has a higher concentration of the first dopant than the second dopant. The method further includes forming a gate stack over the channel region, and forming source and drain features in the source and drain regions. The first portion of the well electrically connects the source and drain features.