The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2019
Filed:
Oct. 22, 2015
Applied Materials, Inc., Santa Clara, CA (US);
Subramaniam V. Iyer, Maharashtra, IN;
Dharma Ratnam Srichurnam, Karnataka, IN;
Devendrappa Holeyannavar, Bangalore, IN;
Douglas MacLeod, Los Altos, CA (US);
Kenneth Carpenter, Leander, TX (US);
Naveen Kumar, Bengaluru, IN;
Vivek R. Rao, Bengaluru, IN;
Patrick Pannese, Mountain View, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments of the present invention provide systems, apparatus, and methods for purging a substrate carrier. Embodiments include a frame configured to sit proximate to a load port door without interfering with operation of a factory interface or equipment front end module robot; one or more inter-substrate nozzle arrays supported by the frame and configured to spray gas into a substrate carrier; and one or more curtain nozzle arrays supported by the frame and configured to spray gas across an opening of the substrate carrier. Numerous additional aspects are disclosed.