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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10509321 B1

PDFFull Text
Date of Patent:
Dec. 17, 2019

Filed:

Jan. 30, 2018

Temperature controlling apparatus and method for forming coating layer

Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Chi-Hung Liao, New Taipei, TW;

Wei-Chang Cheng, Taichung, TW;

Assignee:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Attorney:

JCIPRNET

Primary Examiner:

Mounir S Amer

Int. Cl.
CPC ...
H01L 21/3213 (2006.01); G03F 7/09 (2006.01); G01K 13/02 (2006.01); H05B 3/22 (2006.01); G03F 7/16 (2006.01); G03F 7/30 (2006.01); G03F 7/095 (2006.01); H01L 21/67 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G03F 7/094 (2013.01); G01K 13/02 (2013.01); G03F 7/095 (2013.01); G03F 7/16 (2013.01); G03F 7/162 (2013.01); G03F 7/30 (2013.01); H01L 21/32139 (2013.01); H01L 21/67017 (2013.01); H01L 21/67109 (2013.01); H01L 21/67248 (2013.01); H05B 3/22 (2013.01); H01L 22/12 (2013.01); H01L 22/20 (2013.01);
Abstract

A temperature controlling apparatus includes a platen, a fluid source, a chiller, a first conduit and a second conduit. The fluid source supplies a fluid. The chiller is coupled to the fluid source to cool the fluid in the fluid source to a cooling temperature. The first conduit includes a first inlet in communication with the fluid source, a first outlet and a first heater that heats the fluid from the cooling temperature to a first heating temperature. The fluid heated by the first heater is dispensed on the platen through the first outlet. The second conduit includes a second inlet in communication with the fluid source, a second outlet and a second heater that heats the fluid from the cooling temperature to a second heating temperature different from the first heating temperature. The fluid heated by the second heater is dispensed on the platen through the second outlet.

Find Patent Forward Citations

Liao, Chi-Hung. (2019). Temperature controlling apparatus and method for forming coating layer (U.S. Patent No. 10509321). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10509321

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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