The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2019
Filed:
Apr. 08, 2019
Applicant:
Rohm and Haas Electronic Materials Llc, Marlborough, MA (US);
Inventors:
William Williams, III, Ipswich, MA (US);
Emad Aqad, Northborough, MA (US);
James F. Cameron, Brookline, MA (US);
Assignee:
ROHM AND HAAS ELECTRONIC MATERIALS, LLC, Marlborough, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); C07C 255/31 (2006.01); C07C 25/18 (2006.01); C07C 381/12 (2006.01); C07C 255/24 (2006.01); C07C 255/34 (2006.01); G03F 7/039 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); C07C 25/18 (2013.01); C07C 255/24 (2013.01); C07C 255/31 (2013.01); C07C 255/34 (2013.01); C07C 381/12 (2013.01); G03F 7/0397 (2013.01); C07C 2602/08 (2017.05); C07C 2603/74 (2017.05);
Abstract
A photoacid generator compound having Formula (I): wherein, EWG, Y, R, and Mare the same as described in the specification.