The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2019
Filed:
Jul. 29, 2017
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Xiaoxiong Yuan, San Jose, CA (US);
Yu Lei, Foster City, CA (US);
Yi Xu, San Jose, CA (US);
Kazuya Daito, Milpitas, CA (US);
Pingyan Lei, San Jose, CA (US);
Dien-Yeh Wu, San Jose, CA (US);
Umesh M. Kelkar, Santa Clara, CA (US);
Vikash Banthia, Los Altos, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45544 (2013.01); C23C 16/45508 (2013.01); C23C 16/45536 (2013.01); C23C 16/45561 (2013.01); C23C 16/45563 (2013.01); C23C 16/45565 (2013.01); C23C 16/45574 (2013.01); H01L 21/67017 (2013.01);
Abstract
Embodiments of a blocker plate for use in a substrate process chamber are disclosed herein. In some embodiments, a blocker plate for use in a substrate processing chamber configured to process substrates having a given diameter includes: an annular rim; a central plate disposed within the annular rim; and a plurality of spokes coupling the central plate to the annular rim.