The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2019
Filed:
Jun. 15, 2016
Applicant:
Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW;
Inventors:
Ying-Hsueh Chang Chien, Hsinchu, TW;
James Jeng-Jyi Hwang, Hsin-Chu County, TW;
Chi-Ming Yang, Hsinchu, TW;
Assignee:
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu, TW;
Primary Examiner:
Int. Cl.
CPC ...
B08B 7/02 (2006.01); H01L 21/67 (2006.01); B24B 37/34 (2012.01); B08B 3/12 (2006.01);
U.S. Cl.
CPC ...
B08B 7/028 (2013.01); B08B 3/12 (2013.01); B24B 37/34 (2013.01); H01L 21/67017 (2013.01); H01L 21/67051 (2013.01);
Abstract
The present disclosure provides a particle cleaning apparatus. The apparatus comprises an acoustic wave generator configured to apply an acoustic wave to particles external to the acoustic wave generator. The apparatus also includes a removing module configured to remove the applied particles.