The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 03, 2019

Filed:

Dec. 11, 2017
Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Ruilong Xie, Niskayuna, NY (US);

Lars W. Liebmann, Mechanicville, NY (US);

Balasubramanian Pranatharthi Haran, Watervliet, NY (US);

Veeraraghavan Basker, Schenectady, NY (US);

Assignee:

GLOBALFOUNDRIES Inc., Grand Cayman, KY;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01); H01L 21/321 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76819 (2013.01); H01L 21/321 (2013.01); H01L 21/76877 (2013.01);
Abstract

One illustrative method disclosed includes, among other things, forming at least one layer of sacrificial material above an underlying conductive structure, forming a sacrificial contact structure in the at least one layer of sacrificial material and forming at least one layer of insulating material around the sacrificial contact structure. In this example, the method also includes performing at least one process operation to expose an upper surface of the sacrificial contact structure, removing the sacrificial contact structure so as to form a contact opening that exposes the upper surface of the underlying conductive structure and forming a final contact structure in the contact opening, the final contact structure conductively contacting the underlying conductive structure.


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