The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 03, 2019

Filed:

Jul. 03, 2018
Applicant:

Imec Vzw, Leuven, BE;

Inventors:

Kristof Paredis, Oud-Heverlee, BE;

Umberto Celano, Leuven, BE;

Wilfried Vandervorst, Mechelen, BE;

Oberon Dixon-Luinenburg, Heverlee, BE;

Assignee:

IMEC vzw, Leuven, BE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 60/30 (2010.01); G01R 27/02 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G01Q 60/30 (2013.01); G01R 27/02 (2013.01); H01L 22/14 (2013.01);
Abstract

A method of measuring an electrical characteristic of a current path is disclosed. In one aspect, the method includes a probe for scanning spreading resistance microscopy (SSRM), a test sample contacted by the probe, a back contact on the test sample, a bias voltage source and a logarithmic SSRM amplifier, when a modulation at a predefined frequency is applied to either the contact force of the probe or to the bias voltage, the device comprising electronic circuitry for producing in real time a signal representative of the electrical characteristic, according to the formula logA=±V±log(dV)+V.


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