The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 12, 2019

Filed:

Aug. 19, 2016
Applicant:

Globalfoundries Singapore Pte. Ltd., Singapore, SG;

Inventors:

Bharat Bhushan, Singapore, SG;

Juan Boon Tan, Singapore, SG;

Wanbing Yi, Singapore, SG;

Pak-Chum Danny Shum, Singapore, SG;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 43/12 (2006.01); H01L 43/02 (2006.01); H01L 23/552 (2006.01); H01L 23/29 (2006.01); H01L 23/00 (2006.01); H01L 21/56 (2006.01);
U.S. Cl.
CPC ...
H01L 43/02 (2013.01); H01L 23/295 (2013.01); H01L 23/552 (2013.01); H01L 24/19 (2013.01); H01L 24/20 (2013.01); H01L 24/96 (2013.01); H01L 24/97 (2013.01); H01L 43/12 (2013.01); H01L 21/561 (2013.01); H01L 21/568 (2013.01); H01L 24/32 (2013.01); H01L 24/73 (2013.01); H01L 24/83 (2013.01); H01L 24/92 (2013.01); H01L 2224/04105 (2013.01); H01L 2224/12105 (2013.01); H01L 2224/32245 (2013.01); H01L 2224/73267 (2013.01); H01L 2224/83005 (2013.01); H01L 2224/83191 (2013.01); H01L 2224/92244 (2013.01); H01L 2924/1434 (2013.01); H01L 2924/1435 (2013.01); H01L 2924/15153 (2013.01); H01L 2924/3025 (2013.01);
Abstract

Magnetic random access memory (MRAM) fan-out wafer level packages with package level and chip level magnetic shielding and methods of forming these magnetic shields processed at the wafer-level are disclosed. The method includes providing a MRAM wafer prepared with a plurality of MRAM dies. The MRAM wafer is processed to form a magnetic shield layer over the front side of the MRAM wafer, and the wafer is separated into a plurality of individual dies. An individual MRAM die includes front, back and lateral surfaces and the magnetic shield layer is disposed over the front surface of the MRAM die. Magnetic shield structures are provided over the individual MRAM dies. The magnetic shield structure encapsulates and surrounds back and lateral surfaces of the MRAM die. An encapsulation layer is formed to cover the individual MRAM dies which are provided with magnetic shield structures. A redistribution layer (RDL) is formed over and lines exposed front surfaces of the encapsulated MRAM dies and the encapsulated MRAM dies are separated into individual MRAM fan-out wafer level packages.


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