Method of forming an array of capacitors, a method of forming dram circuitry, and a method of forming an elevationally-elongated conductive structure of integrated circuitry

Abstract

A method of forming elevationally-elongated conductive structures of integrated circuitry comprises providing a substrate comprising a plurality of spaced elevationally-extending conductive vias individually having an upper horizontal perimeter. The conductive vias individually have an upper horizontal perimeter. Masking material is formed directly above the conductive vias. An opening is formed in the masking material directly above individual of the upper horizontal perimeters of individual of the conductive vias. Individual of the masking-material openings comprise a lower horizontal perimeter that overlaps the upper horizontal perimeter of the conductive via directly there-below. Individual of the masking-material openings comprise a lower horizontal perimeter that overlaps the upper horizontal perimeter of the conductive via directly there-below. Conductive material is formed in the individual masking-material openings against sidewalls of the individual masking-material openings and directly against the conductive via directly there-below. An upper horizontal perimeter of the conductive material in the individual masking-material openings extends outwardly beyond the upper horizontal perimeter of the conductive via directly there-below.