The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 12, 2019

Filed:

Aug. 22, 2017
Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Tian Shen, Clifton Park, NY (US);

Anil Kumar, Clifton Park, NY (US);

Yuncheng Song, Halfmoon, NY (US);

Kong Boon Yeap, Clifton Park, NY (US);

Ronald G. Filippi, Jr., Wappingers Falls, NY (US);

Linjun Cao, Ballston Lake, NY (US);

Seungman Choi, Loudonville, NY (US);

Cathryn J. Christiansen, Huntington, VT (US);

Patrick R. Justison, Clifton Park, NY (US);

Assignee:

GLOBALFOUNDRIES INC., Grand Cayman, KY;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); G01R 3/00 (2006.01); G01R 31/12 (2006.01); H01L 21/66 (2006.01); G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67253 (2013.01); G01R 3/00 (2013.01); G01R 31/129 (2013.01); G01R 31/1272 (2013.01); G01R 31/2858 (2013.01); G01R 31/2879 (2013.01); H01L 22/34 (2013.01);
Abstract

An exemplary apparatus includes a testing module connected to, and providing a test voltage to, an integrated circuit containing devices under test. The testing module performs a time-dependent dielectric breakdown (TDDB) test on the devices under test. A decoder is connected to the devices under test and the testing module. The decoder selectively connects each device being tested to the testing module. Efuses are connected to a different one of the devices under test. The efuses separately electrically disconnect each of the devices under test from the test voltage upon failure of a corresponding device under test. Protection circuits are connected between the efuses and a ground voltage. Each protection circuit provides a shunt around the decoder upon failure of the device under test.


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