The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2019
Filed:
Oct. 14, 2014
Rigaku Corporation, Akishima-shi, Tokyo, JP;
Kiyoshi Ogata, Tokyo, JP;
Sei Yoshihara, Saitama, JP;
Takao Kinefuchi, Tokyo, JP;
Shiro Umegaki, Tokyo, JP;
Shigematsu Asano, Tokyo, JP;
Katsutaka Horada, Tokyo, JP;
Muneo Yoshida, Kanagawa, JP;
Hiroshi Motono, Tokyo, JP;
Hideaki Takahashi, Tokyo, JP;
Akifusa Higuchi, Tokyo, JP;
Kazuhiko Omote, Tokyo, JP;
Yoshiyasu Ito, Tokyo, JP;
Naoki Kawahara, Osaka, JP;
Asao Nakano, Kanagawa, JP;
RIGAKU CORPORATION, Akishima-shi, Tokyo, JP;
Abstract
An X-ray thin film inspection device of the present invention includes an X-ray irradiation unitinstalled on a first rotation arm, an X-ray detectorinstalled on a second rotation arm, and a fluorescence X-ray detectorfor detecting fluorescence X-rays generated from an inspection target upon irradiation of X-rays. The X-ray irradiation unitincludes an X-ray optical elementcomprising a confocal mirror for receiving X-rays radiated from an X-ray tube, reflects plural focused X-ray beams monochromatized at a specific wavelength and focuses the plural focused X-ray beams to a preset focal point, and a slit mechanismfor passing therethrough any number of focused X-ray beams out of the plural focused X-ray beams reflected from the X-ray optical element