The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 05, 2019

Filed:

Sep. 22, 2017
Applicant:

Kla-tencor Corporation, Milpitas, CA (US);

Inventor:

David L. Brown, Los Gatos, CA (US);

Assignee:

KLA-Tencor Corporation, Milpitas, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04N 5/372 (2011.01); H04N 5/369 (2011.01); H01L 27/148 (2006.01); H04N 5/3725 (2011.01); H04N 5/376 (2011.01); G02B 26/12 (2006.01); G02B 21/24 (2006.01);
U.S. Cl.
CPC ...
H04N 5/372 (2013.01); G02B 21/245 (2013.01); G02B 26/128 (2013.01); H01L 27/14856 (2013.01); H04N 5/3698 (2013.01); H04N 5/3725 (2013.01); H04N 5/3765 (2013.01); H04N 5/37206 (2013.01); H04N 5/37213 (2013.01); H04N 2201/04782 (2013.01); H04N 2201/04784 (2013.01);
Abstract

A time delay and integration charge coupled device includes an array of pixels and a clock generator. The array of pixels is distributed in a scan direction and a line direction perpendicular to the scan direction in which at least some of the pixels of the array include three or more gates aligned in the scan direction. The clock generator provides clocking signals to transfer charge along the scan direction between two or more pixel groups including two or more pixels adjacent in the scan direction. The clocking signals include phase signals to transfer the charge to an adjacent pixel group along the scan direction at a rate corresponding to the velocity of the target by driving the gates of the two or more pixel groups and generating a common potential well per pixel group for containing charge generated in response to incident illumination.


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