The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 05, 2019

Filed:

Jun. 27, 2016
Applicant:

Mitsubishi Electric Corporation, Chiyoda-ku, JP;

Inventors:

Katsutoshi Sugawara, Tokyo, JP;

Rina Tanaka, Tokyo, JP;

Yutaka Fukui, Tokyo, JP;

Kohei Adachi, Tokyo, JP;

Kazuya Konishi, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/16 (2006.01); H01L 29/49 (2006.01); H01L 29/78 (2006.01); H01L 29/417 (2006.01); H01L 29/423 (2006.01);
U.S. Cl.
CPC ...
H01L 29/1608 (2013.01); H01L 29/41725 (2013.01); H01L 29/42316 (2013.01); H01L 29/49 (2013.01); H01L 29/78 (2013.01);
Abstract

A semiconductor device in which an interlayer insulation film covers striped gate electrodes with a thickness larger than a thickness of a gate oxide film. The interlayer insulation film includes first contact holes outside each striped trench, and second contact holes inside the striped trench. In a plan view, striped active regions and striped contact regions both extending in a longitudinal direction exist. The striped active regions and the striped contact regions are alternately and repeatedly disposed in a direction perpendicular to the longitudinal direction. In each of the striped active regions, the source electrode is connected to a source region through the first contact hole. In each of the striped contact regions, the source electrode is connected to a protective diffusion layer through the second contact hole.


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