The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2019
Filed:
Mar. 14, 2016
Tokyo Electron Limited, Tokyo, JP;
Shigeru Ishizawa, Miyagi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A substrate transfer method of a substrate processing apparatus that includes a load lock chamber including a drive unit that is capable of forming, between a first opening at an atmospheric side and a second opening connected to a transfer chamber of a housing of the load lock chamber, each of a first space in which a single substrate is capable of being transferred, and a second space in which a plurality of substrates are capable of being transferred, the substrate transfer method including selecting either of the first space or the second space of the load lock chamber in accordance with process statuses of substrates at a plurality of processing chambers, and controlling the drive unit based on the selected result to form either of the first space or the second space.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile