The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2019
Filed:
Aug. 07, 2017
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventor:
Hirofumi Kaneko, Oshu, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F27D 1/00 (2006.01); F27D 7/02 (2006.01); F27B 17/00 (2006.01); C23C 16/54 (2006.01); H01L 21/67 (2006.01); C23C 16/44 (2006.01);
U.S. Cl.
CPC ...
F27D 1/0023 (2013.01); C23C 16/4409 (2013.01); C23C 16/54 (2013.01); F27B 17/0025 (2013.01); F27D 7/02 (2013.01); H01L 21/6719 (2013.01); H01L 21/67109 (2013.01);
Abstract
A heat treatment apparatus includes: a reaction tube processing a plurality of substrates; a support member supporting the reaction tube; a flange protruding outwardly from a lower end of the reaction tube: a concave portion formed in an outer periphery of the flange; and a rotatable roller installed in a top surface of the support member. The rotatable roller engages the concave portion and positions the reaction tube in a circumferential direction.