The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2019
Filed:
Apr. 05, 2017
Nuflare Technology, Inc., Yokohama-shi, JP;
Takafumi Inoue, Chigasaki, JP;
NuFlare Technology, Inc., Yokohama-shi, JP;
Abstract
A pattern inspection method includes calculating a first coefficient of a filter function by using data of optical images of plural small regions selected and data of developed images of the plural small regions based on design data; calculating a second coefficient of a filter function by using data of an optical image of a reference small region selected and data of a developed image of the reference small region selected; and determining, for each pixel, whether there exists a pixel for which a difference, between a first temporary reference image to be compared with the optical image of the reference small region generated using the filter function in which the first coefficient is defined and a second temporary reference image to be compared with the optical image of the reference small region generated using the filter function in which the second coefficient is defined, is larger than a threshold.