The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2019
Filed:
Oct. 22, 2015
Hitachi High-technologies Corporation, Minato-ku, Tokyo, JP;
Yoshinobu Kimura, Tokyo, JP;
Natsuki Tsuno, Tokyo, JP;
Toshihide Agemura, Tokyo, JP;
Takeshi Ogashiwa, Tokyo, JP;
Junichiro Tomizawa, Tokyo, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
There is provided a charged particle beam apparatus capable of obtaining a high SN ratio with a small electron irradiation amount. The charged particle beam apparatus includes a charged particle detection device. The charged particle detection device detects an analog pulse waveform signal () in a detection of emitted electrons (1 event) when one primary electron enters a sample, converts the analog pulse waveform signal () into a digital signal (), perform a wave height discrimination () with the use of a unit peak corresponding electron, and outputs the digital signal () as a multilevel count value.