The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 22, 2019

Filed:

Jun. 30, 2015
Applicant:

Thin Film Electronics Asa, Oslo, NO;

Inventors:

Masahisa Endo, Toyama, JP;

Gun Son, Toyama, JP;

Yuichi Goto, Toyama, JP;

Kentaro Nagai, Chiba, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C08G 77/60 (2006.01); C01B 33/02 (2006.01); C01B 33/04 (2006.01); C03C 17/22 (2006.01); B05D 3/02 (2006.01); C01B 33/021 (2006.01); C09D 5/24 (2006.01); C09D 183/16 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C08G 77/60 (2013.01); B05D 3/0254 (2013.01); C01B 33/02 (2013.01); C01B 33/021 (2013.01); C01B 33/04 (2013.01); C03C 17/22 (2013.01); C09D 5/24 (2013.01); C09D 183/16 (2013.01); H01L 21/02532 (2013.01);
Abstract

There is provided a highly conductive and good silicon thin film which is obtained by applying a coating-type polysilane composition prepared by use of a polysilane having a large weight average molecular weight to a substrate, followed by baking. A polysilane having a weight average molecular weight of 5,000 to 8,000. The polysilane may be a polymer of cyclopentasilane. A silicon film obtained by applying a polysilane composition in which the polysilane is dissolved in a solvent to a substrate, and baking the substrate at 100° C. to 425° C. The cyclopentasilane may be polymerized in the presence of a palladium catalyst supported on a polymer. The palladium catalyst supported on a polymer may be a catalyst in which palladium as a catalyst component is immobilized on a functional polystyrene. The palladium may be a palladium compound or a palladium complex. The palladium-immobilized catalyst may be formed by microencapsulating a zero-valent palladium complex or a divalent palladium compound with a functional polystyrene. The zero-valent palladium complex may be a tetrakis(triphenylphosphine)palladium (0) complex.


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