The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2019
Filed:
Dec. 26, 2015
Applicant:
Intel Corporation, Santa Clara, CA (US);
Inventors:
Philip Yashar, Portland, OR (US);
Gokul Malyavanatham, Hillsboro, OR (US);
Assignee:
Intel Corporation, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/285 (2006.01); H01L 23/532 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76843 (2013.01); H01L 21/2855 (2013.01); H01L 21/76877 (2013.01); H01L 23/53238 (2013.01); H01L 21/76871 (2013.01);
Abstract
An embodiment includes an apparatus comprising: a transistor formed on a substrate; and a metal interconnect formed in a dielectric layer above the transistor, wherein: the interconnect comprises a copper layer and a barrier layer that separates the copper layer from the dielectric layer, and the barrier layer comprises tantalum and niobium. Other embodiments are described herein.